- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
How To Order: Slit Valve XGT Series Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Applicable wafer size Symbol 32 Note) Height x width (mm) 32
And fixing seal between the bonnet ASSY and the body 21 is realized by an O-ring . 3-2-2 Closing gate (Figure 2A to Figure 2B) The roller block integrated with the piston rod moves up when pressure is applied to CLOSE side of pressure piping (in other words, pressure is exhausted from OPEN side of pressure piping).
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