Search Results "XGT221-32222-2"
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Series XGT slit valve is suitable for the partition valve between the load lock chamber and the transfer chamber, and between the transfer chamber and the process chamber in semiconductor manufacturing equipment, etc.
- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
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How To Order: Slit Valve XGT Series Note 2) CDE-9SF05 made by HIROSE ELECTRIC CO., LTD. is recommended for the connector (female type). For 200 mm wafer For 300 mm wafer 529
How to order B B XGT 3 1 2 50336 1 C Auto switch and connector (See below) Material of O-ring of gate 1 : FKM 2 : Kalrez4079 C Kalrez is a registered trademark of DuPont Performance Elastomers.
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