- Long service life: 3 million cycles (within standard temperture range)
- Low particle generation: reduced by 1/5 or more (compared with the current product)
How To Order: Slit Valve XGT Series Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Applicable wafer size Symbol 32 Note) Height x width (mm) 32
Construction / Operation 3-1 Construction 6 - 3-2 Operation Figure 1A and B are front view of a slit valve. In these figures, the slit valve closes an opening (slit) 23 which transfers workload and a gate (seal material ) does not clamp (seal) a seating face . In Figure 2A, the slit valve opens and makes the slit 23 able to transfer workload.
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