SMC Corporation of America
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VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time. Fluid: Air/inert gas , Operating pressure range: 0MPa/10Torr (Vacuum

VQD1000 series 4 port, direct operated, poppet solenoid valve offers large flow capacity in a compact, lightweight body. Vacuum applications (up to -100kPa) are possible. Components of the VQD1000 valves that are in contact with fluid are all copper free. The VQD series offers a remarkably quick and stable response time.

  • Fluid: Air/inert gas
  • Operating pressure range: 0MPa
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4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 (A) 4 (B) 2 Single type Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical entry 2 L: Plug lead type L plug connector, With lead wire

) U W M5 x 0.8 U W 633 4 port direct operated poppet solenoid valve 10-VQD1000 Dimensions L plug connector: 10-VQD1121-L-M5 M plug connector: 10-VQD1121-M-M5 Lead wire length 300 mm 2-M5 x 0.8 4(A), 2(B) port Direct manual override Indicator light 0.5 0.5 4 (11) 11 2 5.5 0.6 0.6 15 5.3 5.3 13 34 33 25.5 29 6 3 L plug connector (L) 21.5 4 2-3.5 mounting hole 28.5 49 50.5 2-M5 x 0.8 1 (P),

AW20 (K) ro 40 (K) * When more than one sperrcalDn s.equ red, ndrcate n as.ending nlhe callhe. a phabetica order Port size Nole 1)The on y d ibrence lbm the standard specil lions s fre adjusting spring joflhe regutarol [do6 not resl(cl lhe sen ng ol02MPa ormore sYmbot Pgrt 1 0 20 40 Nole 2) Wlhout a valle tufclon M5 a 1/8 a a a a 3/8 a a 1i2 a 314 a Nole 3) For M5 and NPT thread rype Accessories

PAX1000, PA3000, PA5000 Proper tightening torque Nm Connection threads 12 to 14 Rc 1/4 22 to 24 Rc 3/8 28 to 30 Rc 1/2 28 to 30 Rc 3/4 PB1000 Proper tightening torque Nm Connection threads 1/6 turn after tightening by hand M5 2 to 3 Rc 1/8 Since the threaded sections of the PB1000 are resin, take particular care not to tighten any more than necessary.

Material Diaphragm PTFE, NBR Automatically operated type Check valve PTFE, PFA Discharge rate 1 to 20l/min (0.03 to 0.7SCFM) 5 to 45l/min (0.2 to 1.6SCFM) Average discharge pressure 0 to 0.6MPa (0 to 87psi) Pilot air consumption Maximum 200l/min (ANR) (7SCFM) Maximum 300l/min (ANR) (10.5 SCFM) 1m (3.3ft) (interior of pump dry) 2m (6.6ft) (interior of pump dry) Dry Suction lifting range Up to 6m

exhaust port Rc 1/4 AIR EXH FLUID IN Liquid contact areas ADC12 SCS14 SCS14 ADC12 Material Diaphragm PTFE, NBR Automatically operated type Check valve PTFE, PFA Discharge rate 1 to 20l/min 5 to 45l/min Average discharge pressure 0 to 0.6MPa Pilot air consumption Maximum 200l/min (ANR) Maximum 300l/min (ANR) 1m (interior of pump dry) 2m (interior of pump dry) Dry Suction lifting range Up to 6m

x 0.8 M6 x 1 M6 x 1 UA M5 x 0.8 M5 x 0.8 M6 x 1 M8 x 1.25 M8 x 1.25 TA M4 x 0.7 M4 x 0.7 M5 x 0.8 M5 x 0.8 M6 x 1 P M5 x 0.8 M5 x 0.8 M5 x 0.8 M5 x 0.8 Rc 1/8 Model MHSJ3-32D MHSJ3-40D MHSJ3-50D MHSJ3-63D MHSJ3-80D +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.030 0 +0.062 0 +0.062 0 +0.074 0 +0.074 0 +0.087 0 34H9 42H9 52H9 65H9 82H9 12-7-29 29 3 Finger Parallel Style Air Gripper Through-hole

27.6 0.05 35 18.6 (34.6) 2 x M5 x 0.8 thread depth 8 (Mounting thread) 4 x M5 x 0.8 thread depth 10 (Mounting thread) Prepared hole dia. 4.3 through (Mounting hole) +0.030 0 depth 4 4H9 7.5 0.02 8 0 0.1 (58) 30 42 32 MHZ 16.8 0.02 MHF MHL 29 +0.052 0 depth 3 21H9 When closed 16.3 0 0.7 When open 26.3 +2.2 0.2 18 20 43.5 MHR 84.8 MHK 2 x M5 x 0.8 thread depth 10 (Mounting thread) MHS M5 x

mounting groove (Both sides) (10 only) M5 x 0.8 Piping port Refer to the dimension table.

mounting groove (Both sides) (10 only) M5 x 0.8 Piping port Refer to the dimension table.

x 0.8 (5/32") 30 30 54.4 56 11 67 28.5 13 4 20 44 7 23 31.5 17 M5 x 0.8 6 35 35 79.5 62 17.5 83 45.5 14.5 6 22 50 7 37 36 21 M5 x 0.8 6 35 35 82 62 20 93 48 14.5 6 22 50 7 39 36 21 M5 x 0.8 6 8 76 25 17.5 45 45 105.5 114 65 32 64 7 52 38.5 25 M5 x 0.8 6 499 Series LVD With flow rate adjustment (Max.

Finger assembly Piston assembly MHZA2-6H MHZA-A0607 Main body of adaptor Mounting screw for adaptor Seal MHZA2-6K MHZA-A0608 Endboss assembly MHZA2-6M MHZA-A0609 MHZA2-6E MHZA-A0610 The end boss assembly other than type E should be mounted on the special body. Replacement part/Grease pack part no.: GR-S-010 (10 g) 15 - 3-6.

01 02 M5 1/8 (6A) 1/4 (8A) Electrical entry G-Grommet Orifice size N.O.

AC200230V AC100120V 40 AC100120V 6 AC200230V L 1 L 1 PE L 2 2-M5 2-M5 L 2 L 3 CNP1 CNP1 N N P 1 P 1 P 2 P 2 M4 1.2[Nm] P P C C CNP2 D CNP2 D L 11 L 11 L 21 L 21 U U CNP3 V CNP3 V M5 3.24[Nm] W W 11 2 11 (2) LECSC-S8 [mm] 40 6 5 6 6 (80) 170 CNP1 () CN1 CNP2 CNP3 6 (68) (25.5) MR-J3BA MR-J3BAT 1.0[kg] .

M6 01 02 03 04 M5 x 0.8 N46 x 1.0 PT1/8 PI1/4 PT3/8 Pr1/2 a a a a a a a a a a a a a a a a a a a a a a r ) a a a a a a a a The use of compact spacer with bracket reduces the tota assembled space.