How To Order: VQD1000

4 Port Solenoid Valve Direct Operated Poppet Type Series VQD1000 How to Order Valves 5 1 5 L 1 VQD1 Type of actuation Made to Order Fluid-contact part: Oil-free X16 (A) 4 (B) 2 Single type Port size 1 M5 Nil M5 M5 thread Without sub-plate (Manifold) M5 thread Body ported 1 (P) 3 (R) Base mounted (A) 4 (B) 2 Latching type Electrical entry 2 L: Plug lead type L plug connector, With lead wire

Catalog: 4 Port Solenoid Valve Series VQD1000

300 mm 5 60 58.5 (5) (38) 37 33.5 28.5 P 12 5.5 4 x M5 x 0.8 1 (P), 4(A), 2(B), 3(R) port 13 The dashed line indicates L plug connector. 1554 Series VQD1000 4 Port Solenoid Valve Direct Operated Poppet Type How to Order Manifold How to Order Valves 5 VQD1 1 1 M5 5 L Plug lead unit manifold Type of actuation 1 2 Single type Latching type VV4QD1 5 Body type Manifold 3 5 Body ported Base mounted

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0~0.002 8 -0.4 ~ -0.2 5/16 25 11.5 10.3 RCS-02 6 16 34 10-32UNF 20 0~0.002 10 -0.4 ~ -0.2 3/8 25.6 30 14 18 RCD-025 20 8 20 41 1/4-28UNF 25 0~0.002 10 -0.4 ~ -0.2 3/8 30 14 18 RCS-025 8 20 41 1/4-28UNF 25 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-03 36 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 30 14 12 RCS-03 16 22 42 5/16-24UNF 32 0~0.002 18 -0.5 ~ -03 3/8 41.6 30 14 12 RCD-04

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ANR) Flow rate L/min (ANR) 03, 04 400 200 06, 07 02 01, 23 300 50 03, 04 200 100 01, 23 100 0 0 0 5 0 10 5 0 10 5 0 10 Number of needle rotations Number of needle rotations Number of needle rotations Note) -U10/32 has the same specification as M5.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

U side D side Stations 1 2 3 4 5 VQD1151-5L Port size (Body ported only) M5 thread M5 VQD1000-10A-5 2B 4A 3R 1P 2B 4A VV4QD15-05M5 2-8-8 9 4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 Manifold Option Blanking plate assembly/Body ported VVQD1000-10A-2 VQC Blanking plate assembly includes 2 screws and gasket SQ VQ0 VQ4 Blanking plate assembly/Base mounted VVQD1000-10A-5 VQ5 Courtesy

AC Servo Motor Driver (Network card type ）

5 5.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

CN7 150 CN1 Motor capacity Hole position Mounting dimensions Mounting hole A B C D V5 (100 W) qw 5 5 5 5 V7 (200 W) qw 5 5 5 V8 (400 W) we 5 5 5 5 CN8 CN2 * The mounting hole position varies depending on the motor capacity. w 40 4 -# type LECYU2-Vl Connector name Description CN1 I/O signal connector CN2 Encoder connector CN3 Note) Digital operator connector CN6A MECHATROLINK-3communication

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6 7 7 7 8 8 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 (Note 5) (Note 5) 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 1 2 3 4 5 6 RDP (Note 8) (Note 2) 150 RDN 8 7 7 8 7 7 8 7 7 8 8 8 (Note 6) Branch connector (Note 6) Branch connector (Note 6) Branch connector Note 1.

IZx-OMT0049

Offset voltage adjustment mode . 54 4-4-5. Balance control selection mode . 55 4-4-6. Maintenance detection level selection mode . 56 4-4-7. Key-lock setting mode . 57 4-4-8. Ion generation stop mode . 58 4-5. Alarm function (IZT40/41/42) . 59 4-5-1. Alarms for IZT40 . 59 4-5-2. Alarms for IZT41 and IZT42 . 60 4-5-3. Details of the alarms . 61 5. Performance . 63 5-1.

IZx-OMX0087

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) 1 2 3 4 5 6 VX21 VX22 VX23 2mm 3mm 4.5mm 6mm 8mm 10mm 01 (1/8) 02 (1/4) 02 (1/4) 02 (1/4) 03 (3/8) 03 (3/8) 04 (1/2) 04 (1/2) Courtesy of Steven Engineering, Inc. !

1

, 3/5(E) ports.

Smooth Cylinder/Low Speed Cylinder

n-2) (n = 4, 6) Note 5) D-M9V 5 5 10 + 15 (n-2) (n = 4, 6) Note 5) D-A9V 10 5 D-M9 D-A9 15 + 15 (n-2) (n = 4, 6) Note 5) 10 10 (5) D-M9WV D-M9AV D-M9W D-M9A 15 + 15 (n-2) (n = 4, 6) Note 5) 15 10 20 + 15 (n-2) (n = 4, 6) Note 5) 15 15 (10) D-A7/A80 D-A7H/A80H D-A73C/A80C 15 + 10 (n-2) (n = 4, 6) Note 5) 10 5 Rail mounting D-A7H D-A80H 15 + 15 (n-2) (n = 4, 6) Note 5) 10 5 10

Compact Cylinder

C1 H1 Piston rod cross section 12 16 20 25 G 5 to 30 5 to 30 5 to 50 5 to 50 5 to 50 75,100 58.2 8 10 13 17 9 4 5 5 6 J M E W 62 10 B + Stroke L L + Stroke 71 12 A + 2 (Stroke) 82 15 B1 B1 96.5 32 22 20.5 8 MM MM 106.5 Rod end male thread Bore size (mm) MM X L1 12 16 20 25 32 10.5 12 14 17.5 23.5 14 15.5 18.5 22.5 28.5 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 M14 x 1.5 H1 H1 C1 X C1 X L1 Built-in

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Bore size (mm) B1 C1 H1 L1 MM X 12 8 9 4 14 M5 x 0.8 10.5 16 10 10 5 15.5 M6 x 1.0 12 20 13 12 5 18.5 M8 x 1.25 14 25 17 15 6 22.5 M10 x 1.25 17.5 Standard Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T A B A B 12 5 to 30 25.5 22 30.5 27 6 6 25 5 M3 x 0.5 32 5 3.5 15.5 3.5 M4 x 0.7 6.5 7.5 7 4 0.5 16 5 to 30 25.5 22 30.5 27 8 8 29 5 M4 x 0.7 38 6 3.5 20 3.5 M4 x