How To Order: VFA1000 / 3000 / 5000 Series 5 Port Air Operated Valve

5 Port Air Operated Valve VFA1000/3000/5000 Series Single Unit Body Ported RoHS How to Order Valve VFA 3 1 3 0 01 Body ported Pilot port direction Series 1 3 5 VFA1000 VFA3000 VFA5000 Nil: Upward P: Lateral Pilot port Type of actuation 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center Pilot port Only 1 and 2 are available

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VFA3000

Exhaust center: A, B R1, R2, Pressure center P A, B 3 position closed center 3 position exhaust center Specifications 2 position double 2 position single Fluid Air 0.15 to 0.9 0.1 to 0.9 Operating pressure range (MPa) 3 position pressure center 3 position 0.15 to 0.9 Pilot pressure range (MPa) 2 position double 2 position single (0.4 X P+0.1) to 0.9 P: Operating pressure 0.1 to 0.9 3 position

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

(N11T) (02T) 63 56 (11) PE port R 3 1 P (24) 9 1/4 NPTF P(SUP) port 1/4 NPTF 21 10 R(EXH) port 41 DIN connector (Y) L type plug connector (L) 88.5 300 (Lead wire length) Pg.7 Indicator light 92.5 MAX.10 Indicator light 56 R 3 1 P Cover diameter 1.5 Applicable cord O.D.

5 Port Solenoid Valve Series VFR2000/3000/4000/5000/6000

with 02 2 stations "-02T' is l/S" P,A,B bottom and 1/4" A,B side.

5 Port Solenoid Valve Series SV1000/2000/3000/4000

P EtherCAT P P P EtherNet/IP P P P P P Open network Applicable valve series PROFIBUS DP P P P P P DeviceNet P P P P P P CC-Link P P P P P P P AS-Interface P CANopen P CompoNet SY (Plug-in connector connecting base) 3000 P P P P P P 5000 P P P P P P S0700 (Stacking base) 0700 P P P P P 1000 P P P P P P 2000 P P P P P P SV 3000 P P P P P P 4000 P 1000 P P P P P P VQC 2000 P P P P P P 4000 P

CATALOG

VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .

V

T I O N S B O D Y O P T I O N P O R T I N G Without Bracket F Foot Bracket 12 32 NC Body Ported 22 32 NO Body Ported 14 32 NC Base Mounted 24 32 NO Base Mounted Without Sub Plate 01T 1/8 Sub Plate 02T 1/4 Sub Plate 01T 1/8 (Body Ported) L A M P & S U R G E V O LTA G E S U P P R E S S O R B O D Y O P T I O N Without Z With (Except Grommet Type & 24V AC) S With Surge Suppressor E L E C T R

Series SV

3-position 0 3 Regulator port P port A port (P port control type A port regulated) B port (P port control type B port regulated) P P port A port (P port control type A port regulated) B port (P port control type B port regulated) P Option A1 A1 With pressure gauge (for odd no. station) With pressure gauge (for even no. station) Without pressure gauge 05 B1 B1 Option 06 00 M1 With pressure

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

2 B P 1 P 1 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.

SV

With External Pilot Specifications (Pitch) 24 P = 24 65.8 20 25 11 E 3/5 E 3/5 E 3 A E 3 A 4 A 4 A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 13.7 14.5 35.8 35 58.3 74.8 P 1 P 1 B 2 B 2 B 2 B 2 B 2 P 1 P 1 B 2 B 2 B 2 B 2 B 2 One-touch fitting [1(P), 3/5(E) port] Applicable tubing O.D.: 12 3/8" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 8, 5/16" 10, 3/8" 12 X PE X PE Rc 3/8 [1(P), 3(E)

Series: 5 (VFA5000), Actuation: 3 (3 Position Closed Center), Body: 20, A, B Port Size: 02 (1/4), Thread: T (NPTF)

Compatible Fluid: Air, Operating Environment: Standard / No Oil, Type: Air Operating Type, Switching Type: [Others] 3-position closed center, Connection Type: NPTF, Plumbing Thread Nominal: 1/4, Driving Type: Pilot Type, Bracket: No bracket, Pilot number: -, Number Of Ports: 5, Pilot port direction: Upward, Body Type: VFA1000/VFA5000

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(P .1190) (P .1190) (P .1190) S0700 Note) (P .1212) (P .1214) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) (P .1209) VQ (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) (P .1148) VQ4 (P .1153) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1170) (P .1173) (P .1175) VQ5 (P .1190) (P .1190) (P .1190

4 Way, 5 Port / Solenoid/Pilot Operated NVFR Series

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

-fl Seies

Series NVFR40O0:Base Mounted Tlpe Constructio n/ P ar ts L i.st NVFR4 I OO 2 posi$on sirle 2 Doition double A P B E B P E 3 poBition Closed center/Erhsust center/Pressure center Closed center/NVFR43O0 I & C t 0 $ r P E E A A P B E B P E Main Parts No.

VS 8-2/VS 8-4

P.3, 12 P.3, 12 D-sub connector D-sub connector 25 pins 26 pins Terminal block is compactly arranged on one side. ( ( ) ) ( ) ( ) ( ) Conforming to MIL D-sub connector P.3, 13 P.3, 13 F kit Flat ribbon cable Flat ribbon cable Conforming to MIL flat ribbon cable connector P.3, 15 P.3, 15 P kit Series VS 8-2/VS 8-4 S R S R Conforms to ISO 15407-2 Standard 5 Port Solenoid Valve/Plug-in Type

Serial Transmission System Series EX250 Series EX500

P EA EB 3 position pressure center A B 5 EB P EA 3 position double check A B 6 EB P EA For the solenoid valve specifications and dimensions, please refer to VQC catalog (ES11-80). Please refer to page 13 for Series EX250 single SI unit dimensions. For details of the Series EX250 SI unit, please refer to the technical instruction manual.