High precision, low flow consumption, stainless steel regulator SRP has excellent corrosion resistance. SUS316 is used for all metal parts in contact with the fluid. Consistent clean room production is achieved by cleaning, assembling, inspecting, and sealing in double packaging in a class 10,000 environment.
How To Order: Precision Clean Regulator SRP Series Precision Clean Regulator SRP Series ARJ AR425 to 935 How to Order ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.) ARM Nil Standard Machined bleed port M5 thread Set pressure ARP X201 0 1 0.005 to 0.2 MPa 0.01 to 0.4 MPa X206 With bleed port fittings (Applicable tube O.D.: 4) IR-A Gauge port orientation IR Nil: Standard Port size IRV OUT IN Piping port size M5 x 0.8
Fluid consumption l/min (ANR) Note 1) Sensitivity 0.5 or less 0.3% of full span 1% of full span Repeatability Metal SUS316 Resin Fluororesin Fluid-contact parts Rubber Fluoro rubber Ceramics Other Clean room class 10 Assembly environment HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101
Fluid consumption l/min (ANR) Note 1) Sensitivity 0.5 or less 0.3% of full span 1% of full span Repeatability Metal SUS316 Resin Fluororesin Fluid-contact parts Rubber Fluoro rubber Ceramics Other Clean room class 10 Assembly environment HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101
Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Fluid: Air Initial setting/Inlet pressure: 0.7 MPa Outlet pressure: 0.1 MPa Initial setting/Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa SRP1101 SRP1
-M5 Conditions/Upstream pressure: 0.5MPa SRP1-M5 Conditions/Upstream pressure: 0.7MPa 0.25 0.50 0.20 0.40 Downstream pressure MPa Downstream pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 0 10 20 30 40 50 60 70 80 90 100 Flow rate l/min (ANR) Flow rate l/min (ANR) SRP1-01 SRP1101-01 Conditions/Upstream pressure: 0.5MPa Conditions/Upstream pressure: 0.7MPa 0.25
Can be changed to window comparator mode using push-buttons. 908 2-Color Display Digital Flow Switch Series PFM7 Piping Specifications / Mass Part no. 01 02 N01 N02 F01 C4 F02 4 (5/32") one-touch fitting C6 C6 8 (5/16") one-touch fitting N7 1/4" one-touch fitting 6 one-touch fitting Rc 1/4 NPT 1/8 NPT 1/4 Rc 1/8 Port size G1/8 G1/4 Straight Without orifice: 95 g Bottom Without orifice: 105
How to Order 01 01 3 0 VM8 Actuator type Port size Basic 00 Rc 01 1 8 Roller lever 01 1 8 NPT N01 Adjustable roller lever 13 G F01 1 8 Adjustable rod lever 14 Number of ports 3 3 port Application Movement is changeable. Roller can be mounted to inside of lever.
How to Order 01 01 3 0 VM8 Actuator type Port size Basic 00 Rc 01 1 8 Roller lever 01 1 8 NPT N01 Adjustable roller lever 13 G F01 1 8 Adjustable rod lever 14 Number of ports 3 3 port Application Movement is changeable. Roller can be mounted to inside of lever.
How to Order 01 01 3 0 VM8 Actuator type Port size Basic 00 01 Rc 1 8 Roller lever 01 NPT 1 8 G 1 8 N01 F01 Adjustable roller lever 13 Adjustable rod lever 14 Number of ports 3 3 port Application Movement is changeable. Roller can be mounted to inside of lever.
50 -8No.PF-OMJ0005CN-I * 3 (20 ) LED * OUT * 23% -9No.PF-OMJ0005CN-I 7 PFM (12) 2 (11) 10 0.210(5)L/min 1 25 0.525(12.5)L/min (11) 50 150(25)L/min 11 2100(50)L/min 1( )CO2 A 2 2 S () N 3 M SI4 3 (SI) 4L/min,L A NPN(2) B PNP(2) C NPN(1)+(15V) D NPN(1)+(420mA) E PNP(1)+(15V) F PNP(1)+(420mA) G NPN(1)+5 H PNP(1)+5 5 L 6INOUT () 10 25 50 11 01 Rc1/8 02 Rc1/4 N01 NPT1/8 N02 NPT1/4 F01
G ARP20P-320AS-01 Plug assembly Rc ARP20P-320AS-N01 NPT ARP20P-320AS-F01 G AR20P-370AS-01 Plug Rc AR20P-370AS-N01 PBT RESIN NPT AR20P-370AS-01 G AR23KP-020AS Check valve assembly Check valve plug assembly AR20KP-090AS Note 1 Bracket and Set nut assembly.
Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Control 0 1 Meter-out Meter-in 15-9-89 16 Construction AS2200
(mm) 1in=25.4mm L4 D3 H (width across flats) T2 A L2 D1 L3 D2 T1 L1 Dimensions A Model T2 H D1 T1 D2 D3 L3 L1 L4 L2 AS12 0-M5-T M5 x 0.8 8 9 M5 x 0.8 9 4.5 10 31 10.3 0.7 28.4 AS12 0-U10/32-T 10-32UNF 10-32UNF AS22 0-01-ST Rc 1/8 12 14.3 R 1/8 AS22 0-F01-ST PF 1/8 14.6 7 18 35.6 14.1 1.5 32 AS22 0-N01-ST NPT 1/8 12.7 NPT 1/8 AS22 0-02-ST Rc 1/4 17 18 R 1/4 AS22 0-F02-ST PF 1/4 19.5 7 27.2
Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT
Body size 1 2 3 4 M5 standard 1/8, 1/4 standard 3/8 standard 1/2 standard Port size Type Symbol Cylinder side In the side of solenoid valve M5 01 02 03 04 F01 F02 F03 F04 U10/32 N01 N02 N03 N04 Elbow 2 M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 M5 x 0.8 Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 G 1/8 G 1/4 G 3/8 G 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT
Port size Symbol Cylinder side In the side of solenoid valve M5 01 Elbow M5 x 0.8 R 1/8 M5 x 0.8 Rc 1/8 Rc 1/4 Note 1) 02 R 1/4 Rc 3/8 Note 2) 03 04 F01 Rc 3/8 Rc 1/2 G 1/8 G 1/4 Note 1) R 3/8 R 1/2 R 1/8 Caution Control F02 R 1/4 Meter-out Meter-in Be sure to read before handling.
(at 500 VDC) between terminals and case Standards CE/UKCA marked, UL (CSA) -21No.PF-OMJ0016-J Specifications of piping port Model 01 02 N01 N02 F01 F02 C4 C6 C8 N7 4 8 6 1/4 (5/32") (5/16") Thread type (Port size) Rc Rc NPT NPT G G OneOneOneOne1/8 1/4 1/8 1/4 1/8 1/4 touch fitting touch fitting touch fitting touch fitting Straight without flow adjustment valve 95 g 125 g 55 g Bottom entry