The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.
- Clean regulator series
- One piece structure w/LQ fitting
- Tube porting available
Clean Regulator/Fluororesin Type Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13
Dimensions Tubing/SRF30-T11 2-30 IN OUT 67.7 32.3 52 Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7
Applicable model SRF10 SRF30 SRF50 Tubing size 1/4" 3/8" 3/4" Symbol 07 11 19 Pilot port thread type Nil N Rc 1/8 NPT 1/8 878
Body class 2 3 4 Tubing size 4 Symbol S03 S04 S05 S06 S07 S06 S07 S08 S10 S11 S10 S11 S12 S13 8 Body class Tubing size 1/8" 12 Valve type 4 3/16" 0 N.C. 2 6 1/4" 6 1/4" Body type A Stacking type for manifold 8 3 10 3/8" Lever operation 10 3/8" Symbol Nil L Lever operation Non-locking type (self-reset type) Locking type 4 12 1/2" 17-5-31 29 Series LVH Threaded type manifold/Variations How