How To Order: ® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

HRW002-H HRW002-HS HRW008-H HRW008-HS HRW015-H HRW015-HS HRW030-H HRW030-HS Model Water-cooled Cooling method Ambient temperature/humidity Note 1) Temperature: 50 to 95F (10 to 35C), Humidity: 30 to 70%RH FluorinertFC-40/GALDEN HT200 Circulating fluid Note 2) Temperature range setting Note 1) 68 to 194F (20 to 90C) Cooling capacity (50/60 Hz common) (kW) 2 8 15 29 Circulating fluid system

Catalog: Water-cooledThermo-chiller

Unit: Inch (mm) Model A B C D Fluorinated fluid type Ethylene glycol type Clear/Deionized water type HRW002-H HRW008-H HRW015-H HRW030-H HRW002-H1 HRW008-H1 HRW015-H1 HRW030-H1 HRW002-H2 HRW008-H2 HRW015-H2 HRW030-H2 15 26.2 33.9 0.7 x 0.81 (380) (665) (860) (18.5 to 20.5) 114 Common Specifications Series HRW Communication Function (For details, please consult our Communication Specifications

Operations Manual: HRX-OM-K003

HRX-OM-K003-I Operation Manual Original Instructions THERMO CHILLER HRW002-H HRW008-H HRW015-H HRW030-H HRW002-H1 HRW008-H1 HRW015-H1 HRW030-H1 HRW002-H2 HRW008-H1 HRW015-H2 HRW030-H2 HRW002-HS HRW008-HS HRW015-HS HRW030-HS HRW002-H1S HRW008-H1S HRW015-H1S HRW030-H1S HRW002-H2S HRW008-H1S HRW015-H2S HRW030-H2S Save This Manual Carefully for Use at Any Time 2021 SMC CORPORATION All Rights

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Connector for unit (Plug) 6 y t y t EX600-DXB EX600-DYB EX600-DXC q w q w e q w er e y t y t y t EX600-DXD EX600-DXE EX600-DYE EX600-DME EX600-DXF EX600-DYF EX600-DMF Analog Unit q w e q w e No.

Air Cylinder Series CM2

CS1 2 x LC Width across flats B2 4 x LD MM CS2 Width across flats KA N Y X Width across flats NA N X Y LT S + Stroke LS + Stroke ZZ + 2 x Stroke LX LZ Z + Stroke Built-in One-touch fittings One-touch fitting port size P Spring return One-touch fitting port size P Spring extend Q (mm) LZ MM LX P NN H H1 LT FL Z LH B2 LC LD Y G B1 K KA N NA X D AL F B A H2 I Bore size (mm) 1 8 20 55 40 41

Table of Contents

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Air Cylinder

orifice P G F H2 D I B LH 2 x LC 4 x LD Width across flats B2 MM Width across flats NA LT Y X S + Stroke Z + Stroke X Y Width across flats KA LX LZ LS + Stroke ZZ + 2 x Stroke (mm) Bore size A AL B B1 B2 D F G H H1 H2 I K KA LC LD LH LT LX LZ MM NA P X Y Z 20 18 15.5 40 13 26 8 13 8 41 5 8 28 5 6 4 6.8 25 3.2 40 55 M8 x 1.25 24 1/8 20 8 21 25 22 19.5 47 17 32 10 13 8 45 6 8 33.5 5.5 8 4

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No. q w e r t y u i o !

One-touch Fittings

Different Diameter Double Union Y Different Diameter Plug-in Y Double Plug-in Y KQ2UD KQ2UD KQ2X KQ2XD Round Type Round Type Round Type Round Type Union Y Different Diameter Union Y Plug-in Y Branch Y KQ2U KQ2U KQ2U KQ2U Round Type Round Type Round Type Round Type Plug-in Reducer Bulkhead Male Elbow Tube Cap KQ2R KQ2LE KQ2C * The supported release button type (oval type/round type) is shown

Fluoropolymer Piping Equipment

Note 2) For details of the applicable tubing sizes, refer to page 945. 901 LQ1 Series Dimensions Space saving union tee reducing: LQ1T-S-R B side M2 B side M2 H2 2 x B M1 M1 H1 (E2) 2 x B H2 (L2) L2 M1 M3 M3 F F A side C side A side C side 1/4 1/4 1/4 (E1) (E3) G (E3) H1 H3 H3 G H1 L1 L3 L3 (L1) Class 2 to 5 Type T1 Type T2 Class 2 to 5 M2 B side B side M2 H2 (E2) H1 M1 2 x B 2 x B H2 (L2

Table of Contents

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Stainless Steel 316 Fittings

area (mm2) Weight (g) d M L Model H2 H1 O.D.

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51 +0.2 0 420.1 Plug side 2 x 6 4 x M4 or 4.5 (For mounting) L3 L4 Tubing O.D.: 12 Y Y1 245.50.1 238.5 +0.2 0 4.5 3.5 8 4 3 2 1 5 6 7 9 10 H1 H2 H3 54 +0.2 0 450.1 20 19 18 17 16 15 14 13 12 11 Y Y1 4 x 4.5 Fittings Plug side 2 x 6 4 x M4 or 4.5 (For mounting) Panel mounting hole Model A B C L1 L2 L3 L4 H1 H2 H3 KDM20-10-X1053 29 24.7 8 209 21 225 216 54.5 42 24 KDM20-12-X1053 25.5 31.7

Series CM2-Z 10-/11- ø20, ø25, ø32, ø40 21-/22- Air Cylinder

Relief port (10-, 21-) Vacuum port (11-, 22-) G F MM 2 x LC LZ LX D I 4 x LD 20, 25 Width across flats KA Width across flats B2 Width across flats NA Standard port LT 45 ZZ + Stroke LS + Stroke S + Stroke X Y X Y Z Relief port (10-, 21-) Vacuum port (11-, 22-) 32, 40 (mm) H H2 H1 S P I G D A 12 10 8 6 KA MM NA NN B1 B2 Bore size 13.5 10.5 10.5 10.5 FL K 54 47 47 40 B LH LT LS LX LD 8 13 AL

SMC Pneumatic Clean Series

MM LX 2-LC D I LZ 4-LD 20, 25 Width across flats B2 Width across flats NA Standard port LT 45 N N Relief port Y X Y S + Stroke X Z LS + Stroke ZZ + Stroke 32, 40 (mm) 54 47 47 40 B LH LT LS LX LD 8 13 AL F K MM NA NN B1 B2 Bore size H H2 H1 S P N I G D A ZZ 6.8 4 LC LZ X Y Z 8 8 8 42.5 34.5 30 24 1/8 46.5 37.5 33.5 28 7 5.5 5.5 5 22 17 17 13 41 32 32 26 6 6 5 88 64 62 62 40 32 25 20 24 22

Smooth Cylinder/Low Speed Cylinder

L1 1273-1 A Series CQ2X Accessory Bracket Dimensions Single Knuckle Joint Double Knuckle Joint For I-G012, I-Z015A I-G02, I-G03 For I-G04, I-G05 I-G08, I-G10 For Y-G012, Y-Z015A Y-G02, Y-G03 For Y-G04, Y-G05 Y-G08, Y-G10 ND hole H10 Axis d9 ND hole H10 Axis d9 Material: Carbon steel Surface material: Nickel plated Material: Cast iron Surface material: Nickel plated Material: Carbon steel

Compact Hydraulic Cylinder

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