SMC Corporation of America
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This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, HIGH VACUUM, VACUUM SERIES, XSA HIGH VACUUM VALVE, 1X, XSA OTHER SIZE RATING, 1.34821 lb
Series XSA is a normally closed solenoid valve suitable for air or inert gas in high vacuum applications. This valve functions properly at an operating pressure as low as 1x10-6 Pa (absolute). Face seal and compression fitting options offer extremely low levels of internal and external leakage. Two DC and eight AC voltage options are available, paired with multiple electrical entry
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XSA1 XSA1R-8-1 XSA2 XSA2R-8-1 XSA3 *1 Not CE-compliant For the special option below, refer to page 7. Special electrical entry direction 2

Note 8) Grommet value. 10 XSA-OMS0001-A Fluid property Face seal fitting / compression fitting XSA1-12 XSA1-22 XSA2-22 XSA2-32 XSA2-43 XSA3-32 XSA3-43 C [dm3/(sbar)] 0.55 1.07 1.07 1.51 2.78 1.54 2.89 b 0.41 0.36 0.34 0.24 0.21 0.24 0.21 (Rc, NPT) Threaded ports XSA1-11 XSA1-21 XSA2-22 XSA2-32 XSA3-33 XSA3-43 C [dm3/(sbar)] 0.54 1.14 1.14 2.23 2.37 3.5 b 0.36 0.39 0.42 0.38 0.40 0.15 3.

Model: 2 (Size 2), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: DL (DIN Termianl w/Light, w/Surge Voltage Suppressor)

Model: 2 (Size 2), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

Model: 2 (Size 2), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: D (DIN Terminal w/Surge Voltage Suppressor)

Model: 2 (Size 2), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 5 (24 VDC), Electrical Entry: T (Terminal w/Surge Voltage Suppressor)

Model: 2 (Size 2), Orifice Size: 3 (ø4.5), Fitting Size: 2 (1/4), Fitting Type: V (Face Seal Fitting), Voltage: 3 (110 VAC), Electrical Entry: GS (Grommet w/Surge Voltage Suppressor)

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Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -

Model: -, Orifice Size: -, Fitting Size: -, Fitting Type: -, Voltage: -, Electrical Entry: -, Special Electrical Entry: -, Spacer: -