High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 9 XL*-OMJ0005-C 5.
HIGH VACUUM VALVE, VACUUM SERIES, XLH HIGH VACUUM VALVE, 2X, XLH NO SIZE RATING, 3.08647 lb
Flange Size: 40mm, Heater: None, Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: External: Hard Anodized; Internal: Raw Material, Seal Material: N1 [EPDM (2101-80)], Seal Replacement: A (Valve Seal, Exterior Seal)
Flange Size: 40mm, Heater: None, Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: External: Hard Anodized; Internal: Raw Material, Seal Material: F1 (FKM, Same Specs as Standard FKM), Seal Replacement: A (Valve Seal, Exterior Seal)