High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- High
Operations Manual: High Vacuum L Type Valve Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3
Flange Size: 25mm, Heater: None, Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: External: Hard Anodized; Internal: Raw Material, Seal Material: N1 [EPDM (2101-80)], Seal Replacement: A (Valve Seal, Exterior Seal)
Flange Size: 25mm, Heater: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External: Hard Anodized; Internal: Raw Material, Seal Material: N1 [EPDM (2101-80)], Seal Replacement: Valve Seal, Exterior Seal
Flange Size: 25mm, Heater: 5 to 150°C, with 100°C at 100VAC, 120°C at 200VAC Heater