High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3
XMD-25-M9NA-XN1A The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi Cable Industries, Ltd. 488 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Specifications XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 XMD-25 XYD-25 Model Flange (Valve) size 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal
XMD-25-M9NA-XN1A The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi Cable Industries, Ltd. 7 Series XMD, XYD Specifications XMD-25 XYD-25 XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 Model Flange (valve) size 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal) [both main & initial exhaust valves] Fluid Inactive
14 16.5 18.5 25.5 XLDV-40 XLDV-50 XLDV-63 XLDV-80 13 13 25 Series XLH Manual ValveBellows Seal How to Order XLH 16 High vacuum manual angle valve (Bellows seal) Heater Symbol Heater type Nil None H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Flange size 16 25 40 50 Heater combination table Setting temperature Symbol Model XLH-16 XLH-25 XLH-40