High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve Heater specifications Model XLH-16 XLH-25 XLH-40 XLH-50 Flange (valve) size 16 25 40 50 Valve type Manual type Fluid Vacuum of inert gas Operating temperature oC 5 to 150 Operating pressure Pa Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 Internal 1.3 x 10-10 for the standard material (FKM) Leakage at ambient temperatures , excluding gas permeation Pam3/s External 1.3
Manual ValveBellows Seal How to Order XLH 16 High vacuum manual angle valve (Bellows seal) Heater Symbol Heater type Nil None H1 With heater for 80C (176F) H2 With heater for 100C (212F) H3 With heater for 120C (248F) Flange size 16 25 40 50 Heater combination table Setting temperature Symbol Model XLH-16 XLH-25 XLH-40 XLH-50 80C (176F) H1 100C (212F) H2 120C (248F) H3 Note) Heater cannot
Series RoHS How to Order XLH 16 High vacuum manual angle valve (Bellows seal) q w e XLH q Flange size w Heater Applicable flange size 25 40 50 16 Size 16 25 40 50 Symbol Heater Nil H4 H5 With 100C heater With 120C heater Note) Size 16 is not applicable for H4, H5, Size 25 not for H4. eBody surface treatment/Seal material and its changed part Body surface treatment Seal material changed
Series RoHS How to Order XLH 16 High vacuum manual angle valve (Bellows seal) q w e XLH q Flange size w Heater Applicable flange size 25 40 50 16 Size 16 25 40 50 Symbol Heater Nil H4 H5 With 100C heater With 120C heater Note) Size 16 is not applicable for H4, H5, Size 25 not for H4. eBody surface treatment/Seal material and its changed part Body surface treatment Seal material changed