High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Similar items in stock.
2 Stainless steel NBR End plate Gasket y !3 Stainless steel Piston bolt u Replacement Parts Main parts MHS2-16D MHS2-20D MHS2-25D MHS2-32D MHS2-40D MHS2-50D MHS2-63D Description !0!1!2!
0.88 MHSH(J)3-63DA MHSH(J)3-63DB M61 7.3 25D M30.5 0.88 32D M40.7 2.1 MHSH(J)3-80DA MHSH(J)3-80DB M61 7.3 40D M50.8 4.3 50D M50.8 4.3 ) MHSJ3MHSHJ3 63D M50.8 4.3 11 1 . 2 . 12 3 . 4 . <> .AS1200M3M5 AS220001 AS1000 AS1001FAS2051F 3-4 1. 1 5m 2 3 5 13 3-5 1 2 1.52 3-6 1 2 3 4 5 6 3-7 1 ISO VG32 4 4-1 1 2 3 14 4-2 MHS2 MHS3 MHS4 C O O MHS2MHS4 MHS3 15 MHSJ3
Please contact SMC for details. 14 XLG Series Specifications Model XLG-16-2 XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Valve type Double acting (Dual operation), Pressurize to open/close Fluid Inert gas under vacuum Operating temperature [C] XLG 5 to 60 (High-temperature type: 5 to 150) Operating pressure [Pa(abs)] Atmospheric pressure to 1 x 105 Conductance [L/s]*1 5 14 45 80 160 200 Leakage