High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Heater specifications Itemsymbol XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.
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1 CE-compliant Q CE-compliant Nil 437 B XLG/XLGV Series Specifications Model XLG(V)-16 XLG(V)-25 XLG(V)-40 Double acting (Dual operation), Pressurize to open/close Inert gas under vacuum 5 to 60 (High temperature type: 5 to 150) XLG-50 XLG-63 XLG-80 XLG-100 XLG-160 Valve type Fluid XLG XLGV Operating temperature (C) 5 to 50 Operating pressure (Pa) (abs) Conductance (L/s) Note 1) Atmospheric
J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.
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