High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: XLG Series Model XLG-16 XLG-25 XLG-40 XLG-50-1 XLG-63-1 XLG-80-1 XLG-100-1 XLG-160-1 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Double acting / pressurized to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal
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Please contact us for the latest version.sales@ocaire.com, XLG NO SIZE RATING, VACUUM SERIES, XLG HIGH VACUUM VALVE, 2X, XLG NO SIZE RATING, 3.63762 lb
Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy), Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)
Flange Size: 50, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 1 (Legacy), Auto Switch: M9P--Solid State, Gen. Purpose, 3 Wire PNP, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed)