High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Heater specifications Itemsymbol XLG-25-2 XLG-40-2 XLG-50-2 XLG-63-2 XLG-80-2 Rated voltage of the heater 90 to 240 ACV Heater assembly number XL1A25-60S-1 XL1A25-60S-1 XL1A25-60S-2 XL1A25-60S-3 No. of heater assemblies 1 pc. 1 pc. 1 pc. 1 pc.
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Flange Size: 25, Flange Type: KF(NW), Port Direction: L (Rear Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: C (1pc, Valve Closed)