High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve Similar items in stock.
Note 9) Refer to SMC catalog CAT.ES100-42 for detailed specifications and instructions of digital pressure switch. 14-2-73 74 Filter Regulator with Back Flow Mechanism Series AW20K/30K/40K How to Order AW 30 03 BE K F 1N Option Filter regulator Applicable model AW20K to 40K AW20K to 40K AW20K to 40K AW30K/40K AW20K AW30K/40K AW20K to 40K AW20K to 40K AW30K/40K AW20K to 40K Symbol 1 2 6 8
cock with barb fitting (6 x 4 nylon tube) Applicable models AW20K to 40K AW20K to 40K AW20K to 40K AW30K, 40K AW20K AW30K, 40K AW20K to 40K AW20K to 40K AW30K, 40K AW20K to 40K Symbol 1 Note 1) 2 6 8 C J Note 2) N R W Z Note 3) Body size 20 30 40 1/8 3/8 1/2 With backflow mechanism Note) AW10 comes with a backflow mechanism as a standard feature.
Note 2) AW30K, 40K 01 1/8 AW20K E With square embedded type pressure gauge (with limit indicator) AW20K to 40K 02 1/4 G With round pressure gauge (with limit indicator) AW20K to 40K 03 3/8 H With set nut (for panel mount) AW20K to 40K 04 1/2 Note 1) Optional parts are not assembled and are supplied loose at the time of shipment (except for options C, D and E). 06 3/4 Note 2) Applicable tube