High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41 67 29 12 XL-OMV0003 5-3.Dimensions Size 50, 63, 80 E C C E E (KF flange) (K flange) Fd Fn D K J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J K XLG-50-2 70 185 79 46 11 75 52 72 29 9 XLG-63-2 88 212 100 55 11
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Auto switch: Heater: 438 B XLG/XLGV Series Aluminum High Vacuum Angle Valve Dimensions XLG16, 25, 40/ Air operated (b) E C D E E C (KF flange) Fn (a) Heater (Option) (c) Auto switch (Option) J H B G A A (mm) J A B C D E Note 1) Fn G H Model XLG-16 XLG-25 XLG-40 40 110 38 1 30 17 40 26 50 121 48 1 40 26 39 28 12 65 171 66 2 55 41 63 36 11 Note 1) Dimension E applies when heater option is
Auto switch: Heater: 438 A XLG/XLGV Series Aluminum High Vacuum Angle Valve Dimensions XLG16, 25, 40/ Air operated (b) E C D E E C (KF flange) Fn (a) Heater (Option) (c) Auto switch (Option) J H B G A A (mm) J A B C D E Note 1) Fn G H Model XLG-16 XLG-25 XLG-40 40 110 38 1 30 17 40 26 50 121 48 1 40 26 39 28 12 65 171 66 2 55 41 63 36 11 Note 1) Dimension E applies when heater option is
J 26 28 36 38 45 56 Model XLG-16 XLG-25 XLG-40 XLG-50 XLG-63 XLG-80 Model 12 11 11 11 11 39 63 68 69 96 39 63 68 69 96 XLG-50 XLG-63 88 95 110 Note 1) Dimension E applies when heater option is included.