High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Q1 [KALREZ® (4079)], Seal Replacement: A (2-3-4)
Flange Size: 16, Flange Type: KF(NW), Port Direction: Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9//--(w/o Auto Switch and w/Built-in Magnet)