High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLF is
Operations Manual: XLF Series It was confirmed that XLF-16, XLF-25 and XLF-40 satisfied the product specification up to 3 million cycles, XLF-50 , XLF-63 and XLF80 did up to2 million cycles. XLF-100 and XLF-160 did up to 1 million cycles. The test was performed with FKM, the standard sealing material.
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Compact and lightweight Portable type weighing only about 100g (unit 50g, battery 50g) can also be held in the palm of the hand. Measurement unit switching for global use Freely selectable display units and easy unit conversions also make it ideal for the SI unit transition period.
Standard Stroke MVGQ Bore size (mm) Standard stroke Symbol Specifications CC 10 -XA Change of rod end shape 15, 30, 45, 60 16 15, 30, 45, 60 RB If types for more than the strokes indicated in the table above (61 strokes) are required, please ask SMC.
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -