High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLF is
Operations Manual: XLF Series -16 40 103 38 1 30 17 40 XLF-25 50 113 48 1 12 40 26 39 XLF-40 65 158 66 2 11 55 41 63 XLF-50 70 170 79 2 11 75 52 68 XLF-63 88 196 100 3 11 87 95 70 69 XLF-80 90 235 117 3 11 114 110 83 96 XLF-100 108 300 154 3 11 134 130 102 131 XLF-160 138 315 200 3 11 190 180 153 112 9 XL*-OMJ0003-D 5.
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XMD-25-M9NA-XN1A The material used in the sliding part of the S-valve is: FKM : Produced by Mitsubishi Cable Industries, Ltd. 488 Stainless steel High Vacuum Angle/In-line Valve XMD, XYD Series Specifications XMD-40 XYD-40 XMD-50 XYD-50 XMD-63 XYD-63 XMD-80 XYD-80 XMD-25 XYD-25 Model Flange (Valve) size 25 40, CF070 50 63, CF114 80 Valve type Normally closed (Pressurize to open, spring seal
Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.
Heater: Indicator: 428 B XLF/XLFV Series Aluminum High Vacuum Angle Valve Dimensions XLF/Air operated (b) E C D E C E Fn (KF flange) (K flange) Fd (a) Heater (Option) (c) Auto switch (Option) H G B A A (mm) A B C D E Note 1) Fn Fd G H Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 40 103 38 1 30 17 40 12 50 113 48 1 40 26 39 11 65 158 66 2 55 41 63 11 70 170 79 2 75