High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLF is
1 Valve mounting screw falling-out-prevention type EX600 Series Standard (Valve mounting screw not falling-out-prevention type) VM SY30V-16A-1 SY30V-16AR-1 SY50V-16A-1 SY50V-16AR-1 SY70V-16A-1 SY70V-16AR-1 SY30V-16A SY30V-16AR SY50V-16A SY50V-16AR SY70V-16A SY70V-16AR Internal pilot External pilot Internal pilot External pilot Internal pilot External pilot SY3000 XT34 SY5000 SY7000 The part
Applicable rod end nut A L1 H1 H A L1 H1 H2 H I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A I type single knuckle I-12A I-14A I-16A Y type double knuckle Y-12A Y-14A Y-16A 125 140 160 125 140 160 NT-12 NT-12 NT-16 110 50 3.5 100 156.5 125 65 100 181 18 110 50 3.5 105 161.5 125 65 105 186 18 120 56 3.5 110 170.5 140 76 110 198 21 Symbol -XC87 Cylinder with
Description Material Special resin Seal belt MY16-16A-Stroke MY20-16A-Stroke MY25-16A-Stroke MY32-16A-Stroke MY40-16A-Stroke MY50-16A-Stroke MY63-16A-Stroke 1 !6 Stainless steel NBR NBR NBR NBR NBR NBR MY16-16B-Stroke MY20-16B-Stroke MY25-16B-Stroke MY32-16B-Stroke MY40-16B-Stroke MY50-16B-Stroke MY63-16B-Stroke 1 Dust seal band !
16 44.7 24.1 15.6 41.5 32.8 7.5 6 12 16 KQ2R12-16A 18.5 45.7 25.1 17 58.3 46.1 9 7 Note) D is maximum diameter.
Y-14A Y-16A H2 H1 L1 A H I type single knuckle I-12A I-14A I-16A Bore size (mm) 125 140 160 NT-12 NT-12 NT-16 18 18 21 181 186 198 100 105 110 65 65 76 125 125 140 29 These safety instructions are intended to prevent hazardous situations and/or equipment damage.