High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLF is
Operations Manual: XLF Series Specifications Model XLF-16 XLF-25 XLF-40 XLF-50 XLF-63 XLF-80 XLF-100 XLF-160 Flange (valve) size 16 25 40 50 63 80 100 160 Actuating type Normally closed Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa (abs) Atmospheric pressure to 1 x 10-5 Conductance l/s Note 1 5 14 45 80 160 200 300 800 Internal 1.3 x 10-10 for the
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Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material
Flange Size: 16, Flange Type: KF(NW), Port Direction: w/o Indicator, Flange Side, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External: Hard Anodized - Internal: Raw Material, Seal Material: EPDM
ULTIC ARMOR is a registered trademark of Nippon Valqua Industries, Ltd. 427 B XLF/XLFV Series Specifications Model XLF(V)-16 XLF(V)-25 XLF(V)-40 XLF(V)-50 XLF(V)-63 XLF(V)-80 XLF(V)-100 XLF(V)-160 Valve type Normally closed (Pressurize to open, Spring seal) Fluid Inert gas under vacuum XLF 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLFV 5 to 50 Operating pressure