High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
XLF is
Operations Manual: XLF Series It was confirmed that XLF-16, XLF-25 and XLF-40 satisfied the product specification up to 3 million cycles, XLF-50 , XLF-63 and XLF80 did up to2 million cycles. XLF-100 and XLF-160 did up to 1 million cycles. The test was performed with FKM, the standard sealing material.
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Flange Size: 50, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire: L (3m), Number: A (2pcs, Valve Open/Closed), Non-standard Indicator: X (Non-standard Indicator), Body Surface Treatment: A (External: Hard Anodized - Internal: Oxalic Acid Anodized)
Flange Size: 50, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Legacy, Auto Switch: A90--Reed, AC Volt, Horizontal, Lead Wire: 3m, Number: 2pcs, Valve Open/Closed, Non-standard Indicator: Non-standard Indicator, Body Surface Treatment: External: Hard Anodized - Internal: Oxalic Acid Anodized, Seal Material: -, Seal Replacement: -
Flange Size: -, Flange Type: -, Port Direction: -, Temperature: -, Version: -, Auto Switch: -, Lead Wire: -, Number: -, Non-standard Indicator: -, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -