High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: XLDV Series It was confirmed that XLDV-25, XLDV-40, XLDV-50, XLDV-63 and XLDV-80 satisfied the valve specification up to 2 million cycles, XLDV-100 and XLDV-160 did up to 1 million cycles. The test was performed with FKM, the standard sealing material.
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