High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
- Light
Operations Manual: XLDV Series It was confirmed that XLDV-25, XLDV-40, XLDV-50, XLDV-63 and XLDV-80 satisfied the valve specification up to 2 million cycles, XLDV-100 and XLDV-160 did up to 1 million cycles. The test was performed with FKM, the standard sealing material.
Similar items in stock.
Note IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG3, 3H Body Brass Aluminum alloy 1 Platinum silver coated (IDG1 is electroless nickel plated.) Female connector Brass 2 Electroless nickel plated Strainer Brass 3 Case 4 Resin Orifice Resin Stainless steel 5 Silencer Bronze 6 Replacement Parts Part no. IDG1 IDG3H IDG5 IDG5H IDG10 IDG10H IDG20 IDG20H No.
/30K-B/40K-B/50K-B/60K-B Bracket assembly Panel mounting disassembly drawing Bracket assembly Mounting screws (2 pcs) Bracket Products Bracket assembly AR20K-B / 25K-B / 30K-B / 40K-B Bracket assembly Bracket assembly B / 60K-B AR50K-B / 60K (Roulette faces) (Roulette faces) Bracket assembly (Concave) Set nut (Convex) Products Bracket 14 9.
Valve Type: XLDV (Smooth Exhaust, Normally Closed, Bellows, O-ring Seal), Flange Size: 25, Flange Type: KF (NW), Valve Direction: K (w/o Indicator, Left Flange Surface; Std.