High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.
For option Q, the solenoid valve should be a CE-compliant product. 449 B XLD/XLDV Series Specifications Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-100 XLD(V)-160 Valve type Normally closed (Spring Return and seal) [Both main & initial exhaust valves] Fluid Inert gas under vacuum XLD 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLDV 5 to 50 Operating
-25 XLD-40 XLD-50 XLD-63 XLD-80 12 11 11 11 11 41 63 68 72 98 95 110 Note 1) Dimension E applies when heater option is included.
For option Q, the solenoid valve should be a CE-compliant product. 449 XLD/XLDV Series Specifications Model XLD(V)-25 XLD(V)-40 XLD(V)-50 XLD(V)-63 XLD(V)-80 XLD(V)-100 XLD(V)-160 Valve type Normally closed (Spring Return and seal) [Both main & initial exhaust valves] Fluid Inert gas under vacuum XLD 5 to 60 (High temperature type: 5 to 150) Operating temperature (C) XLDV 5 to 50 Operating