High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve It was confirmed that XLD-25, XLD-40 XLD-50, XLD-63 and XLD-80 satisfied the product specification up to 2 million cycles, XLD-100 and XLD-160 did up to 1 million cycles. Test piece posture: lateral : The test was performed with FKM, the standard sealing material.
Valve Type: XMA (Angle Type, Normally Closed, Bellows Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface), Temperature: H0 (5 to 150°C), Suffix: , Auto Switch: w/o Auto Switch & Built-in Magnet, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: None (w/o Auto Switch), Seal Material: XR3 (ChemrazÂ
Valve Type: XMD (Angle Type, 2 Stage Control, Single Acting, Bellows, O-ring Seal), Flange Size: 40, Flange Type: KF (NW), Port Direction: L (w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface), Temperature: H0 (5 to 150°C), Suffix: , Auto Switch: w/o Auto Switch & Built-in Magnet, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: None (w/o Auto Switch)
Valve Type: Angle Type, Normally Closed, Bellows Seal, Flange Size: 40, Flange Type: KF (NW), Port Direction: w/o Indicator, Rear Flange Surface; Indicator Std, Rear Flange Surface, Temperature: 5 to 150°C, Suffix: -, Auto Switch: w/o Auto Switch & Built-in Magnet, Lead Wire: 0.5m (or None in the Case of No Auto Switch), Number: None (w/o Auto Switch), Seal Material: Chemraz® SSE38, Seal