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SMC XLD-40H0 high vacuum valve, XLD HIGH VACUUM VALVE***

HIGH VACUUM VALVE

https://www.smcpneumatics.com/XLD-40H0.html

XLD, Aluminum High Vacuum Angle Valve, Air Operated

High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.

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https://www.smcpneumatics.com/Part-Builder-Links_ep_2458-1.html?https://partbuilder.smcpneumatics.com/product-search-results/XLD-40H0

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CAD FILES FROM ETECH

It was confirmed that XLD-25, XLD-40 XLD-50, XLD-63 and XLD-80 satisfied the product specification up to 2 million cycles, XLD-100 and XLD-160 did up to 1 million cycles. Test piece posture: lateral : The test was performed with FKM, the standard sealing material.

https://smccatalog.partbuilder.smcpneumatics.com/dl_catalogs/assets/manual/en-jp/files/XLD-E.pdf

Aluminum High Vacuum Angle Valve, 2-Step Control, Single Acting / Bellows Seal, O-Ring Seal, XLD Series

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SMC XLD-40H0-XQ3A high vacuum valve, HIGH VACUUM VALVE

HIGH VACUUM VALVE, HIGH VACUUM VALVE, 1.2 lb

https://www.smcpneumatics.com/XLD-40H0-XQ3A.html

SMC XLC-40H0 high vacuum valve, XLC HIGH VACCUM VALVE***

This is a legacy product, and replaced byXLC-40H0-2

https://www.smcpneumatics.com/XLC-40H0.html

XL-OMY0002

XLD-63 XLD-80 XLD-25 XLD-40 XLD-50 XLD-100 XLD-160 0.08 Nm 0.3 Nm 6-3.S S S S 6-4.M M M S 6-5./ S M S M 12 XL-OMY0002 7.