High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Operations Manual: High Vacuum L Type Valve It was confirmed that XLD-25, XLD-40 XLD-50, XLD-63 and XLD-80 satisfied the product specification up to 2 million cycles, XLD-100 and XLD-160 did up to 1 million cycles. Test piece posture: lateral : The test was performed with FKM, the standard sealing material.
Find the pilot air pressure and pilot air consumption for a discharge rate of 6l/min and a total lifting range of 25m. [The transfer fluid is fresh water (viscosity 1mPaS, specific gravity 1.0).] If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to discharge pressure of 0.1MPa. Caution 1.
Find the pilot air pressure and pilot air consumption for a discharge rate of 6l/min and a total lifting range of 25m. [The transfer fluid is fresh water (viscosity 1mPaS, specific gravity 1.0).] If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to discharge pressure of 0.1MPa. Caution 1.
Find the pilot air pressure and pilot air consumption for a discharge rate of 6l/min and a total lifting range of 25m. [The transfer fluid is fresh water (viscosity 1mPaS, specific gravity 1.0).] If the discharge pressure is required instead of the total lifting height, a total lift of 10m corresponds to discharge pressure of 0.1MPa. Caution 1.