Operations Manual: High Vacuum L Type Valve

Valve specifications Model XLC-16-2 XLC-25-2 XLC-40-2 XLC-50-2 XLC-63-2 XLC-80-2 Flange (valve) size 16 25 40 50 63 80 Actuating type Double acting (Dual operation), Pressurize to open/close Fluid Vacuum of inert gas Operating temperature oC 5 to 60 (5 to 150 for high temperature type) Operating pressure Pa(abs) Atmospheric pressure to 1 x 10-6 Conductance l/s Note 1) 5 14 45 80 160 200 Internal

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