High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
Operations Manual: High Vacuum L Type Valve -16-2 40 108 38 30 17 41 XLAV-25-2 50 121 48 40 26 46 XLAV-40-2 65 171 66 55 41 54.5 XLAV-50-2 70 185 79 75 52 61 XLAV-63-2 88 212 100 87 95 70 80.5 XLAV-80-2 90 257 117 114 110 83 90.5 Model K L M N S T XLAV-16-2 17.2 10.2 3.6 3.6 M5 M5 XLAV-25-2 21.4 10.2 3.6 3.6 M5 M5 XLAV-40-2 33.9 10.2 3.6 3.6 M5 M5 XLAV-50-2 38.2 10.2 3.6 3.6 M5 M5 XLAV-63-2 43.8 12 4 2 Rc1/8 M5 XLAV-80-2 59.8 12 4
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Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: 2, Auto Switch: M9N--Solid State, Gen.
Purpose, 3 Wire NPN, Horizontal, Lead Wire: 5m, Number: 2pcs, Valve Open/Closed, Voltage: 24 VDC, Electrical Entry: M Type Plug Connector, Surge Suppressor: None, Non-standard Indicator: Standard, Body Surface Treatment: Standard: External - Hard Anodized; Internal - Raw Material, Seal Material: FKM (1349-80), Seal Replacement: None, CE-Compliant: CE-Compliant
Flange Size: 16, Flange Type: KF(NW), Port Direction: G (w/Indicator, Rear Flange Surface), Temperature: 5 to 60°C, Version: 2 (Refresh), Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: A (2pcs, Valve Open/Closed)
Flange Size: 16, Flange Type: KF(NW), Port Direction: w/Indicator, Rear Flange Surface, Temperature: 5 to 60°C, Version: Refresh, Auto Switch: M9N--Solid State, Gen. Purpose, 3 Wire NPN, Horizontal, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: 2pcs, Valve Open/Closed, Body Surface Treatment: -, Seal Material: -, Seal Replacement: -, X152: -, Non-standard Indicator: -
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: M (M Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: H [Grommet ( Lead Wire Length 600mm)], Surge Suppressor: Z (w/Light
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 5 (24 VDC), Electrical Entry: L (L Type Plug Connector), Surge Suppressor: Z (w/Light & Surge Voltage
Valve Type: XLAV (Normally Closed, Bellows Seal), Flange Size: 16, Flange Type: KF (NW), Valve Direction: G (w/Indicator, Rear Flange Surface), Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 3 (110 VAC, 50/60 Hz), Electrical Entry: G [Grommet (Lead Wire Length 300mm)]
Valve Type: Normally Closed, Bellows Seal, Flange Size: 16, Flange Type: KF (NW), Valve Direction: w/Indicator, Rear Flange Surface, Version: None, Auto Switch: w/o Auto Switch and w/o Built-in Magnet, Lead Wire: 0.5m (Or None in the Case of No Auto Switch), Number: None, Voltage: 24 VDC, Electrical Entry: G [Grommet (Lead Wire Length 300mm)], Surge Suppressor: -, Non-standard Indicator: