High vacuum angle valve series XL provides excellent thermal conductivity results in a uniform temperature for the entire valve body and a marked decrease in the condensation of gases inside the valve. The valve does not contain heavy metals such as Ni (nickel) or Cr (chrome) and a low sputtering yield also helps to minimize heavy metal contamination of semiconductor wafers.
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Note IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG3, 3H Body Brass Aluminum alloy 1 Platinum silver coated (IDG1 is electroless nickel plated.) Female connector Brass 2 Electroless nickel plated Strainer Brass 3 Case 4 Resin Orifice Resin Stainless steel 5 Silencer Bronze 6 Replacement Parts Part no. IDG1 IDG3H IDG5 IDG5H IDG10 IDG10H IDG20 IDG20H No.
Effective area of the built-in back pressure check valve type is reduced approximately 20%. 55 Series SV D-sub Connector Manifold Electrical Wiring 10F/16F D-sub Connector Type (25 pins) 13 Common Common 12 25 Light/Surge voltage suppressor 24 SOL. B 11 Station 1 SOL. A Light/Surge voltage suppressor 15 SOL. B Station 2 SOL. A Light/Surge voltage suppressor 2 14 SOL. B Station 1 SOL.
Refer to Specific Product Precautions 2 on page 450. 399 Series SV Manifold Electrical Wiring 10F/16F D-sub Connector Type (25 pins) 13 Common Common 12 25 Light/Surge voltage suppressor 24 SOL.B 11 Station 11 SOL.A Light/Surge voltage suppressor 15 SOL.B Station 2 SOL.A Light/Surge voltage suppressor 2 14 SOL.B Station 1 SOL.A 1 Light/Surge voltage suppressor This circuit has double wiring
-4 M-5H-6 MS-5AU-4, MS-5AU-6 MS-5H-4, MS-5H-6 Black (Translucent) 500
C A 11.8 12.6 1.1 1.4 3.0 3.1 MS-5ALHU-3 MS-5ALHU-4 4.5 5.0 1.6 1.8 8 8.8 10.8 2.5 14.6 2.4 3.7 MS-5ALHU-6 7.0 MS-5ALHU-6 Hose nipple: MS-5H-4, -6 Effective area (mm2) Weight (g) Part No. L B D E F 6.5 8.5 2.1 4.0 2.5 3.7 MS-5H-4 MS-5H-6 15.5 16.5 7 8 1.8 2.5 7 8 Hose elbow: MS-5HLH-4, -6 lB Effective area (mm2) Weight (g) Part No.
-4/-6 Effective area (mm2) Weight (g) A B C D E H Model M-5H-4 M-5H-6 7 8 2.1 4.0 2.7 3.9 15.5 16.5 8.5 9.5 7 8 1.8 2.5 6.5 8.5 M5 x 0.8 Width across flats 7 15-2-57 5 Series M Series M5 Hose Elbow: M-5HL-4/-6 Weight (g) 4.4 5.2 Effective area (mm2) 1.4 2.4 Model F E D C B A M-5HL-4 M-5HL-6 6.5 8.5 1.8 2.5 7 8 8.5 9.5 12.5 13.5 16.5 17.5 M5 x 0.8 Hose Elbow: M-5HLH-4/-6 Width across flats
Note 3) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3H, 5H).
Note 3) Includes 1 l/min (ANR) of purge air flow (at 0.7 MPa inlet air pressure) for the dew point indicator (except IDG3H, 5H).
IDG10, 20 IDG10H, 20H Optional specifications Optional specifications With fitting for purge air discharge (Option: P) With fitting for purge air discharge (Option: P) IN OUT IN OUT Purge Purge Purge Purge Parts list Material Description IDG1 IDG5, 5H IDG10, 10H IDG20, 20H No.
Note IDG1 IDG5, 5H IDG10, 10H IDG20, 20H IDG3, 3H Body Brass Aluminum alloy 1 Platinum silver coated (IDG1 is electroless nickel plated.) Female connector Brass 2 Electroless nickel plated Strainer Brass 3 Case 4 Resin Orifice Resin Stainless steel 5 Silencer Brass 6 Replacement Parts Part no. No.