High precision, low flow consumption, stainless steel regulator SRP has excellent corrosion resistance. SUS316 is used for all metal parts in contact with the fluid. Consistent clean room production is achieved by cleaning, assembling, inspecting, and sealing in double packaging in a class 10,000 environment.
How To Order: Precision Clean Regulator SRP Series Precision Clean Regulator SRP Series ARJ AR425 to 935 How to Order ARX SRP 1 1 0 1 01 AMR Made to Order (Refer to page 874 for details.) ARM Nil Standard Machined bleed port M5 thread Set pressure ARP X201 0 1 0.005 to 0.2 MPa 0.01 to 0.4 MPa X206 With bleed port fittings (Applicable tube O.D.: 4) IR-A Gauge port orientation IR Nil: Standard Port size IRV OUT IN Piping port size M5 x 0.8
Fluid consumption l/min (ANR) Note 1) Sensitivity 0.5 or less 0.3% of full span 1% of full span Repeatability Metal SUS316 Resin Fluororesin Fluid-contact parts Rubber Fluoro rubber Ceramics Other Clean room class 10 Assembly environment HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101
Fluid consumption l/min (ANR) Note 1) Sensitivity 0.5 or less 0.3% of full span 1% of full span Repeatability Metal SUS316 Resin Fluororesin Fluid-contact parts Rubber Fluoro rubber Ceramics Other Clean room class 10 Assembly environment HCFC141b ultrasonic cleaning of all fluid-contact parts Parts cleaning Note 1) At set pressure of 0.2MPa 1 Series SRP Flow Characteristics Fluid: Air SRP1101
Outlet pressure MPa Outlet pressure MPa 0.15 0.30 0.10 0.20 0.05 0.10 0.00 0.00 0 20 40 60 80 100 120 140 160 180 200 0 20 40 60 80 100 120 140 Flow rate L/min (ANR) Flow rate L/min (ANR) Pressure Characteristics (Representative value) Fluid: Air Initial setting/Inlet pressure: 0.7 MPa Outlet pressure: 0.1 MPa Initial setting/Inlet pressure: 0.7 MPa Outlet pressure: 0.2 MPa SRP1101 SRP1