The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.
- Clean regulator series
- One piece structure w/LQ fitting
- Tube porting available
Clean Regulator/Fluororesin Type Description Material Note Fluorine coated Spring holder 11 Insert bushing Nut Collar 13 14 15 New PFA New PFA New PFA Valve spring 12 Fluorine coated 882 Clean Regulator/Fluororesin Type SRF Series Construction/SRF50 SRF50 Integrated fittings With nut e r y t e ARJ t u y r u AR425 to 935 i w i ARX !5 q AMR !4 ARM !1 !1 o o ARP !0 !2 !3 !3 !0 IR-A w w !2 IR !4 IRV !5 VEX !
Applicable model SRF10 SRF30 SRF50 Tubing size 1/4" 3/8" 3/4" Symbol 07 11 19 Pilot port thread type Nil N Rc 1/8 NPT 1/8 878
Body Size: 50, Type: S (One Piece Structure w/LQ Fitting), Tube Size: 13 (ø1/2" x ø3/8")
Body Size: 50, Type: S (One Piece Structure w/LQ Fitting), Tube Size: 19 (ø3/4" Tube Extensión - ø19 x ø16 mm or ø3/4" x ø5/8" Integral Fitting), Pilot Port: N (NPT)