The SRF30 series is designed to regulate DI water and N2 gas in the clean room. Fluoro resin material is used in the fluid contact area. The fluid contact area is washed with freon ultra sonic and DI water.
- Clean regulator series
- One piece structure w/LQ fitting
- Tube porting available
Clean Regulator/Fluororesin Type Nil X401 Standard Applicable fittings LQ1 LQ2 Symbol 1 2 Nil N Rc 1/8 NPT 1/8 Rotating the mounting hole 90 Fitting size (IN side) Fitting size (OUT side) Note 2) Note 2) Applicable model SRF10 SRF30 SRF50 Applicable model SRF10 SRF30 SRF50 Fitting size Fitting type Applicable fitting size Fitting type Symbol Symbol Nil 07 11 13 19 25 Note 1) 2 3 4 5 6 Same as IN side 2 3 4 5 6 07 11 13
Dimensions Tubing/SRF30-T11 2-30 IN OUT 67.7 32.3 52 Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7 Integral fittings/SRF30-S IN OUT 67.7 32.3 52 (112) Pilot port identification symbols and port types (marking) Symbol R N Port type Rc 1/8 NPT 1/8 12 R 75 52 64 1 2 SMC 4-5.5 41.7
Applicable model SRF10 SRF30 SRF50 Tubing size 1/4" 3/8" 3/4" Symbol 07 11 19 Pilot port thread type Nil N Rc 1/8 NPT 1/8 878
DWith M3 port 2023 mm x 15 mm x 10 mm 9.5 g Variations Page Page Page 12-8-14 12-8-14 12-8-22 MHC2-6n MHCA2-6n MHCM2-7S Model Cylinder bore 6 6 7 Double acting Action Single acting (Normally open) Single acting (Normally open) 30n to s10n Opening/Closing angle (Both sides) 20 to s7 0.038 Nm (Double acting) Holding moment (at 0.5 MPa) 0.017 Nm 0.024 Nm (Single acting) Repeat ability Maximum