The MXZ incorporates a compact cylinder with a linear guide. The MXZ has a very short overall length compared to other SMC guided actuators yet does not sacrifice anti-deflection capabilities.
MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 0.00 0 5 10 15 20 25 Load [N] Load [N] Load [N] MXZ20 MXZ20 MXZ20 0.25 0.40 0.25 ST 35, 40 ST 45, 50 ST 45, 50 ST 45, 50 Table displacement
/min) 0.40 (At 20L/min) Inverter-driven flow control function applied Inverter-driven flow control function applied Main Tank capacity*7 L Approx.15 Approx.15 Sub Tank capacity*8 L Approx.16 Approx.16 Circulating fluid port (supply/return) Rc 3/4 Rc 3/4 Facility water C / MPa 10 to 35 / 0.3 to 0.7 Required flow of facility water*9 L/min 15 (Facility water at 25C) 15 (Facility water at 25C
/min) 0.45 /0.65 (At 20L/min) (58 / 87 [PSIG] At 5.3[gal/min]) (65 / 94 [PSIG] At 5.3[gal/min]) Main Tank capacity*5 L Approx.12 (3.2 [gal]) Approx.15 (4 [gal]) Sub Tank capacity *6 L Approx.15 (4 [gal]) Approx.16 (4.2 [gal]) Circulating fluid port Rc 3/4 Facility water C/MPa 10 to 25 / 0.3 to 0.7 (45 to 100 [PSIG]) Required flow of facility water*9 (50Hz/60Hz) L/min 3/4 5/6 9/10 13/14 (0.8
MHY2 MHW2 MRHQ Limitations of Holding Point Auto switch MHK2-12l MHKL2-12l MHK2-16l MHKL2-16l MHK2-20l MHKL2-20l MHK2-25l MHKL2-25l 120 60 100 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 100 50 50 Pressure 0.2MPa 80 Pressure 0.2MPa 40 40 80 Pressure 0.2MPa Pressure 0.2MPa 60 30 30 60 0.3MPa 0.4MPa 0.5MPa 0.6MPa 0.3MPa 0.4MPa 0.5MPa