HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with a 60% ethylene glycol aqueous solution
fluid temperature (C) Heating Capacity HRZ010-WS/010-W1S/010-W2S 7 HRZ010-WS 6 Heating capacity (kW) 5 HRZ010-W1S 4 3 HRZ010-W2S 2 1 0 20 10 0 10 20 30 40 50 60 70 80 90 Circulating fluid temperature (C) Pump Capacity (Thermo-chiller Outlet) HRZ010-WS HRZ010-W1S 1 0.5 [Outlet port: Max.]
H1 HRZ002-W HRZ008-W HRZ002-W1 HRZ008-W1 HRZ010-WS HRZ010-W1S HRZ010-W2S *1 : For HRZ001-H* and HRZ002-H* , electron expansion valve is thermo static expansion valve.
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