HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. Both the pump and compressor rotations are inverter controlled for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations. This model is compatible with tap water or deionized water for
HRZ001-L-Z HRZ001-L1-Z HRZ002-L-Z HRZ002-L1-Z HRZ004-L-Z HRZ004-L1-Z HRZ004-H-Z HRZ004-H1-Z HRZ008-H-Z HRZ008-H1-Z HRZ001-L2-Z HRZ002-L2-Z HRZ004-L2-Z HRZ008-L2-Z HRZ002-W-Z HRZ002-W1-Z HRZ008-W-Z HRZ008-W1-Z HRZ010-WS-Z HRZ010-W1S-Z HRZ010-W2S-Z HRZ001-H-Z HRZ001-H1-Z HRZ002-H-Z HRZ002-H1-Z HRZ008-L-Z HRZ008-L1-Z Applicable model Circulating fluid recoverable volume Note 1) L 15 16 17 Purge
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