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dual 3-port valve Operating pressure range Internal pilot operating pressure range (MPa) 0.1 to 0.7 (High pressure type: 0.1 to 1) 100 kPa to 0.7 (4-position: 100 kPa to 0.6) 100 kPa to 0.7 (High pressure type: 100 kPa to 1) 2-position single 2-position double 3-position External pilot operating pressure range (MPa) Pilot pressure range 0.25 to 0.7 0.1 to 0.7 (High pressure type: 0.1 to

Air Cylinder

, 125, 150 25 25, 50, 75, 100, 125, 150 32 25, 50, 75, 100, 125, 150, 200 40 25, 50, 75, 100, 125, 150, 200, 250 Note 1) Other intermediate strokes can be manufactured upon receipt of order.

Air Slide Table

1.0 1.0 V = 500 V = 500 0.5 0.5 0 10 20 30 40 50 60 70 80 90 100 0.0 0.0 0 20 40 60 80 100 120 140 L3: Overhang Allowable range: 100 mm L3: Overhang Allowable range: 140 mm Allowable overhang L [mm] Allowable overhang L [mm] MXQ16B-75Z MXQ16B-100, 150Z 4.5 4.5 V = mm/s V = mm/s Max. operating pressure: 300 mm/s 4.0 4.0 3.5 3.5 Load mass m [kg] Load mass m [kg] 3.0 3.0 2.5 2.5 V = 100 2.0

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CKG150-150Z/CKP150-150Z CKG163-150Z/CKP163-150Z Auto switch mounting bracket B CKG40-RZ150 CKG150-200Z/CKP150-200Z CKG163-200Z/CKP163-200Z CKG40-RZ200 D-M9/M9W D-M9A/A9 Switch mounting rod 2 Mount the part E of the auto switch mounting bracket so that it is in contact with the cylinder tube.

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9 9 80 92 108 75, 100 74 56 M FV 80 10 to 50 73.5 53.5 83.5 63.5 11 11 99 116 134 75, 100 83.5 63.5 100 10 to 50 85 63 95 73 11 11 117 136 154 75, 100 95 73 FT L B + Stroke A + Stroke 4 x FD FX FZ Bore size (mm) Stroke range (mm) L L1 M 63 10 to 50 18 43.5 60 75, 100 80 10 to 50 20 53.5 77 75, 100 100 10 to 50 22 53.5 94 75, 100 L1 Flange bracket material: Carbon steel Surface treatment: