SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
4 7.5 9.5 6 2.5 0.5 6 10 11 4 7.5 9.5 6 10 11 4 7.5 9.5 2 [4.5] 1.5 [1] 3.5 [1] Long Stroke 5 5.5 9 10 19.5 21.5 25 27 1 1.5 4 6 12 16 20 25 7 6 12 14 5 [-2.5] 5 5.5 9 10 7 6 12 14 17 19 22.5 24.5 9 9.5 13 14 11 10.5 16 18 1 0.5 6 8 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 11 10.5 16 18 4.5 [2] 10 [7.5] 12 [9.5] Anti-lateral Load Type 6 5.5 9 10 19.5 21.5 25 27 7 6.5 2.5 0.5 12 16 20 25 1 5
Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).
9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.
11 99 134 20 53.5 77 100 100 64 12 43.5 M12 x 1.75 22 85 63 117 136 11 11 154 22 53.5 94 For details about the rod end nut and accessory brackets, refer to page 19.