SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.
Base gasket (for metal base and sub-plate) SY70M-11-1A SY50M-11-1A SY30M-11-1A w plug-in VZ1000-11-4VZ1000-11-4VZ1000-11-1e Refer to page 239. DIN rail Clamp bracket assembly (for metal base) Part numbers shown on the left are for the clamp bracket assembly for one manifold (two sets of clamp brackets).
9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.
13 14 5 5.5 9.5 11.5 19.5 21.5 25 27 Bore size (mm) Double acting: double rod 3.5[6] 3[5.5] 8[10.5] 10[12.5] 1.5 2 6 7 5.5 5 10 12 1.5 2 6 7 5.5 5 10 12 12 16 20 25 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16 19.5 21.5 25 27 Bore size (mm) CU CQS Auto switch model No.