SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
4 7.5 9.5 6 2.5 0.5 6 10 11 4 7.5 9.5 6 10 11 4 7.5 9.5 2 [4.5] 1.5 [1] 3.5 [1] Long Stroke 5 5.5 9 10 19.5 21.5 25 27 1 1.5 4 6 12 16 20 25 7 6 12 14 5 [-2.5] 5 5.5 9 10 7 6 12 14 17 19 22.5 24.5 9 9.5 13 14 11 10.5 16 18 1 0.5 6 8 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 11 10.5 16 18 4.5 [2] 10 [7.5] 12 [9.5] Anti-lateral Load Type 6 5.5 9 10 19.5 21.5 25 27 7 6.5 2.5 0.5 12 16 20 25 1 5
Refer to page 11. However, the operating piston speed is ranged from 50 to 400 mm/s.
Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.
9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.