SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.
9.5 0.5 11 9.5 26.5 ( ): Denotes the values of D-A93.
Straight type V Elbow type Fitting size One-touch fittings for regulator Straight V 2.5 3 6.5 Elbow W 6 6.5 6 Elbow X 11 11 11.5 Elbow Y 35.5 36 38.5 4, 5/32 6 1/4 8, 5/16 W X Y Note) The O-ring is attached.
Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12