SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
4 7.5 9.5 6 2.5 0.5 6 10 11 4 7.5 9.5 6 10 11 4 7.5 9.5 2 [4.5] 1.5 [1] 3.5 [1] Long Stroke 5 5.5 9 10 19.5 21.5 25 27 1 1.5 4 6 12 16 20 25 7 6 12 14 5 [-2.5] 5 5.5 9 10 7 6 12 14 17 19 22.5 24.5 9 9.5 13 14 11 10.5 16 18 1 0.5 6 8 9 9.5 13 14 11 10.5 16 18 9 9.5 13 14 11 10.5 16 18 4.5 [2] 10 [7.5] 12 [9.5] Anti-lateral Load Type 6 5.5 9 10 19.5 21.5 25 27 7 6.5 2.5 0.5 12 16 20 25 1 5
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(Long stroke) Model C D Mounting bolt CDQSB12-5D CDQSB12-10D CDQSB12-15D CDQSB12-20D CDQSB12-25D CDQSB12-30D CDQSB12-35DC CDQSB12-40DC CDQSB12-45DC CDQSB12-50DC CDQSB12-75DC CDQSB12-100DC CDQSB16-5D CDQSB12-10D CDQSB12-15D CDQSB12-20D CDQSB12-25D CDQSB12-30D CDQSB12-35DC CDQSB12-40DC CDQSB12-45DC CDQSB12-50DC CDQSB12-75DC CDQSB12-100DC CDQSB20-5D CDQSB12-10D CDQSB12-15D CDQSB12-20D CDQSB12
Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12