SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
(mm) 12 16 20 25 5 to 30 32.2 25.2 6 6 25 M3 x 0.5 32 5 3.5 15.5 3.5 6.5 depth 3.5 10 5 to 30 33 26 8 8 29 M4 x 0.7 38 6 3.5 20 3.5 6.5 depth 3.5 10 10 5 to 50 35 26 7 10 36 M5 x 0.8 47 8 4.5 25.5 5.5 9 depth 7 9.5 10 5 to 50 39 29 12 12 40 M6 x 1.0 52 10 5 28 5.5 9 depth 7 11 10 Note 2) The external dimensions with rubber bumper are same as those of the standard, as shown above.
1 5 5.5 7.5 1 [3.5] 6 5.5 9 10 1 5 5.5 7.5 17 19 22.5 24.5 10 9.5 13 14 5 9 9.5 11.5 5 4.5 0.5 1.5 10 9.5 13 14 5 9 9.5 11.5 10 9.5 13 14 5 9 9.5 11.5 0.5 [3] 3.5 [1] 5.5 [3] DDouble Acting, Double Rod 1.5 2 6 7 19.5 21.5 25 27 2.5 3 2 4 12 16 20 25 5.5 5 10 12 3.5 [6] 3 [5.5] 8 [10.5] 10 [12.5] 1.5 2 6 7 5.5 5 10 12 17 19 22.5 24.5 5.5 6 10 11 9.5 9 14 16 0.5 1 4 6 5.5 6 10 11 9.5 9 14 16
12 16 5, 10, 15, 20 25, 30 7-4-20 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQS 12, 16 20, 25 12 16 20 25 5, 10 7-4-12 Solid state switch D-M9N/M9NV D-M9P/M9PV D-M9B/M9BV D-F9NW/F9NWV D-F9PW/F9PWV D-F9BW/F9BWV D-F9BAL Series CQSK 12 16 5, 10, 15, 20 25, 30 7-4-28 20 25 5, 10, 15, 20 25, 30, 35, 40 45, 50 Series CQSS 12 16 5, 10, 15, 20 25, 30 (1) 7-4-36 20 25 5, 10, 15, 20 25, 30,
10 12 16 20 5 6.5 8 10 14 15 18 20 7 10 12 14 4 4 5 5 5 5 8 10 * Refer to P.2.3-18 for detail of the rod end nut and mounting brackets.