SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The
How To Order: Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder Copper, fluorine and silicone-free + Low particulate generation Action 21 22 Relief type Vacuum suction type D Double acting Rod end thread Nil M Standard (Rod end female thread) Rod end male thread Model Model Bore size (mm) Port size Relief port Action Standard stroke (mm) 10-/21-CQSB12 10-/21-CQSB16 10-/21-CQSB20 10-/21-CQSB25 11-/22-CQSB12 11-/22-CQSB16 11-/22-CQSB20 11-/22-CQSB25 12
bolt CQSKWB20-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D D Non-rotating rod side mounting 10 10 CQSKWB25-5D -10D -15D -20D -25D -30D -35D -40D -45D -50D C' Mounting bolt D' 7 7 Note) When mounting a cylinder with through-hole, be sure to use the attached plain washer.
x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)
D-M9A D-M9V Qty. of auto switches mounted D-A9 D-M9 D-P3DW Note 1) 5 10(5) 15 (10) 15 (5) 1 pc. 10 15 5 10 10 15 (10) 15 (5) 2 pcs. 10 15 5 Note 1) 25 is only applicable for D-P3DW.