SMC's CQS clean room, compact air cylinder has 4 bore sizes. Standard strokes range from 5 to 50mm. 10/11-C(D)QS series, available for clean environment, prevents particle generation in a clean room. 21/22-C(D)QS series offers the same structure as the clean series, and are for the environment in which the use of copper, fluorine and silicon are restricted. The 
10 6 3.5 1.5 (1) 6 3.5 22.5 9.5 27 11 11 9.5 0.5 24.5 7 5.5 3.5 (1) 7 5.5 ( ): Denotes the values of D-A93.
x 0.8 12 10 12 10 1 (P) 3 (R) 1 (P) XT34 Poppet VM200 2 port 3 port (A) 2 (A) 2 Side ported 1/4 Page 337 12 12 10 10 1 (P) 3 (R) 1 (P) VM400 3 port (OUT) 2 3 10 12 1 (N.C.)
7.5 10 25 7.5 2.5 10 7.5 4.5 3.5 [1] 7 5.5 7 5.5 24.5 11 9.5 11 27 9.5 1.5 0 32 0.5 11 9.5 2.5 Note 1) [ ]: Denotes the values of D-A93.
499 710 IN OUT 50 412 742 1072 When spring is set in cylinder When spring is compressed with air Weight (g) Action Bore size (mm) Cylinder stroke (mm) (N) Single Acting, Spring Extend 5 10 15 20 Bore size (mm) Stroke (mm) Spring reaction force (N) Second First 12 16 20 25 32 40 50 12 16 20 25 32 40 50 29 35 42 51 5 10 5 10 5 10 5 10 5 10 5 10 10 20 11 9.7 20 20 27 27 29 29 29 29 29 29